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| 2005 | ||
|---|---|---|
| 1 | Takayuki Shimazu, Makoto Katayama, Yoshitada Isono: Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices. IEICE Transactions 88-C(5): 1020-1024 (2005) | |
| 1 | Makoto Katayama | [1] |
| 2 | Takayuki Shimazu | [1] |
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