Seiji Inumiya

	2007
1		Yanli Pei, Hideki Murakami, Seiichiro Higashi, Seiichi Miyazaki, Seiji Inumiya, Yasuo Nara: Evaluation of Dielectric Reliability of Ultrathin HfSiOxNy in Metal-Gate Capacitors. IEICE Transactions 90-C(5): 962-967 (2007)

Coauthor Index

1	Seiichiro Higashi	[1]
2	Seiichi Miyazaki	[1]
3	Hideki Murakami	[1]
4	Yasuo Nara	[1]
5	Yanli Pei	[1]

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