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| 2006 | ||
|---|---|---|
| 1 | Tung-Ho Lin, Ming-Hsiung Hung, Rung-Chuan Lin, Fan-Tien Cheng: A Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing. ICRA 2006: 1054-1059 | |
| 1 | Fan-Tien Cheng | [1] |
| 2 | Rung-Chuan Lin | [1] |
| 3 | Tung-Ho Lin | [1] |
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