J. Hormes

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1997

1 H. Zumaqué, Gregory Allen Kohring, J. Hormes: Simulation of Energy Deposition in Deep X-Ray Lithography. PARCO 1997: 221-224

	1997
1		H. Zumaqué, Gregory Allen Kohring, J. Hormes: Simulation of Energy Deposition in Deep X-Ray Lithography. PARCO 1997: 221-224

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