Dennis W. Hess

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1999

1 Dennis W. Hess: Plasma-assisted oxidation, anodization, and nitridation of silicon. IBM Journal of Research and Development 43(1): 127-146 (1999)

	1999
1		Dennis W. Hess: Plasma-assisted oxidation, anodization, and nitridation of silicon. IBM Journal of Research and Development 43(1): 127-146 (1999)

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