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| 2005 | ||
|---|---|---|
| 2 | S. Beckx, M. Demand, S. Locorotondo, K. Henson, M. Claes, V. Paraschiv, D. Shamiryan, P. Jaenen, W. Boullart, S. Degendt: Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development. Microelectronics Reliability 45(5-6): 1007-1011 (2005) | |
| 1 | T. Schram, L.-Å. Ragnarsson, G. Lujan, W. Deweerd, J. Chen, W. Tsai, K. Henson, R. J. P. Lander, J. C. Hooker, J. Vertommen: Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors. Microelectronics Reliability 45(5-6): 779-782 (2005) | |
| 1 | S. Beckx | [2] |
| 2 | W. Boullart | [2] |
| 3 | J. Chen | [1] |
| 4 | M. Claes | [2] |
| 5 | S. Degendt | [2] |
| 6 | M. Demand | [2] |
| 7 | W. Deweerd | [1] |
| 8 | J. C. Hooker | [1] |
| 9 | P. Jaenen | [2] |
| 10 | R. J. P. Lander | [1] |
| 11 | S. Locorotondo | [2] |
| 12 | G. Lujan | [1] |
| 13 | V. Paraschiv | [2] |
| 14 | L.-Å. Ragnarsson | [1] |
| 15 | T. Schram | [1] |
| 16 | D. Shamiryan | [2] |
| 17 | W. Tsai | [1] |
| 18 | J. Vertommen | [1] |
Colors in the list of coauthors
Last update Thu May 31 18:55:10 2012 CET by the DBLP Team —
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