R. Hellin-Rico

	2007
1		R. Hellin-Rico, J.-P. Celis, K. Baert, Chris Van Hoof, Ann Witvrouw: A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C CoRR abs/0711.3317: (2007)

Coauthor Index

1	K. Baert	[1]
2	J.-P. Celis	[1]
3	Chris Van Hoof	[1]
4	Ann Witvrouw	[1]

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