Kenji Harafuji

	1993
1		Kenji Harafuji, Akio Misaka, Noboru Nomura, Masahiro Kawamoto, Hirohiko Yamashita: A novel hierarchical approach for proximity effect correction in electron beam lithography. IEEE Trans. on CAD of Integrated Circuits and Systems 12(10): 1508-1514 (1993)

Coauthor Index

1	Masahiro Kawamoto	[1]
2	Akio Misaka	[1]
3	Noboru Nomura	[1]
4	Hirohiko Yamashita	[1]

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