E. Halova

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2005

1 E. Halova, S. Alexandrova, A. Szekeres, M. Modreanu: LPCVD-silicon oxynitride films: interface properties. Microelectronics Reliability 45(5-6): 982-985 (2005)

	2005
1		E. Halova, S. Alexandrova, A. Szekeres, M. Modreanu: LPCVD-silicon oxynitride films: interface properties. Microelectronics Reliability 45(5-6): 982-985 (2005)

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