G. González-Díaz

	2005
1		S. Dueñas, H. Castán, H. García, J. Barbolla, E. San Andrés, I. Mártil, G. González-Díaz: On the influence of substrate cleaning method and rapid thermal annealing conditions on the electrical characteristics of Al/SiNx/SiO2/Si fabricated by ECR-CVD. Microelectronics Reliability 45(5-6): 978-981 (2005)

Coauthor Index

1	E. San Andrés	[1]
2	J. Barbolla	[1]
3	H. Castán	[1]
4	S. Dueñas	[1]
5	H. García	[1]
6	I. Mártil	[1]

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