Sherri J. Gillespie

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1984

1 Sherri J. Gillespie: Resist Profile Control in E-Beam Lithography. IBM Journal of Research and Development 28(4): 454-460 (1984)

	1984
1		Sherri J. Gillespie: Resist Profile Control in E-Beam Lithography. IBM Journal of Research and Development 28(4): 454-460 (1984)

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