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| 2008 | ||
|---|---|---|
| 1 | Kiyoshi Ishii, Yoshifumi Saitou, Kengo Furutani, Hiroshi Sakuma, Yoshito Ikeda: Estimation of Optimum Ion Energy for the Reduction of Resistivity in Bias Sputtering of ITO Thin Films. IEICE Transactions 91-C(10): 1653-1657 (2008) | |
| 1 | Yoshito Ikeda | [1] |
| 2 | Kiyoshi Ishii | [1] |
| 3 | Yoshifumi Saitou | [1] |
| 4 | Hiroshi Sakuma | [1] |
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