Xiqiu Fan

	2006
1		Xiqiu Fan, Honghai Zhang, Sheng Liu, Xiaofeng Hu, Ke Jia: NIL - a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology. Microelectronics Journal 37(2): 121-126 (2006)

Coauthor Index

1	Xiaofeng Hu	[1]
2	Ke Jia	[1]
3	Sheng Liu	[1]
4	Honghai Zhang	[1]

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