D. Fabrègue

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2007

1 D. Fabrègue, Nicolas André, T. Pardoen, J. P. Raskin: New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films CoRR abs/0711.3332: (2007)

	2007
1		D. Fabrègue, Nicolas André, T. Pardoen, J. P. Raskin: New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films CoRR abs/0711.3332: (2007)

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