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| 2007 | ||
|---|---|---|
| 2 | S. Abermann, J. K. Efavi, G. Sjöblom, M. C. Lemme, J. Olsson, Emmerich Bertagnolli: Impact of Al-, Ni-, TiN-, and Mo-metal gates on MOCVD-grown HfO2 and ZrO2 high-kappa dielectrics. Microelectronics Reliability 47(4-5): 536-539 (2007) | |
| 2005 | ||
| 1 | M. C. Lemme, J. K. Efavi, H. D. B. Gottlob, T. Mollenhauer, T. Wahlbrink, H. Kurz: Comparison of metal gate electrodes on MOCVD HfO2. Microelectronics Reliability 45(5-6): 953-956 (2005) | |
| 1 | S. Abermann | [2] |
| 2 | Emmerich Bertagnolli | [2] |
| 3 | H. D. B. Gottlob | [1] |
| 4 | H. Kurz | [1] |
| 5 | M. C. Lemme | [1] [2] |
| 6 | T. Mollenhauer | [1] |
| 7 | J. Olsson | [2] |
| 8 | G. Sjöblom | [2] |
| 9 | T. Wahlbrink | [1] |
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