K. Y. Ee

	2005
2		C. F. Tsang, C. K. Chang, A. Krishnamoorthy, K. Y. Ee, Y. J. Su, H. Y. Li, W. H. Li, L. Y. Wong: A study of post-etch wet clean on electrical and reliability performance of Cu/low k interconnections. Microelectronics Reliability 45(3-4): 517-525 (2005)
	2004
1		C. F. Tsang, C. Y. Li, A. Krishnamoorthy, Y. J. Su, H. Y. Li, L. Y. Wong, W. H. Li, L. J. Tang, K. Y. Ee: Impact of barrier deposition process on electrical and reliability performance of Cu/CVD low k SiOCH metallization. Microelectronics Journal 35(9): 693-700 (2004)

Coauthor Index

1	C. K. Chang	[2]
2	A. Krishnamoorthy	[1] [2]
3	C. Y. Li	[1]
4	H. Y. Li	[1] [2]
5	W. H. Li	[1] [2]
6	Y. J. Su	[1] [2]
7	L. J. Tang	[1]
8	C. F. Tsang	[1] [2]
9	L. Y. Wong	[1] [2]

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