 | 2007 |
| 3 |  | S. Dueñas,
H. Castán,
H. García,
L. Bailón,
K. Kukli,
T. Hatanpää,
Mikko Ritala,
Markku Leskelä:
Experimental observations of temperature-dependent flat band voltage transients on high-k dielectrics.
Microelectronics Reliability 47(4-5): 653-656 (2007) |
| 2005 |
| 2 |  | S. Dueñas,
H. Castán,
H. García,
J. Barbolla,
K. Kukli,
J. Aarik,
Mikko Ritala,
Markku Leskelä:
Electrical characterization of hafnium oxide and hafnium-rich silicate films grown by atomic layer deposition.
Microelectronics Reliability 45(5-6): 949-952 (2005) |
| 1 |  | S. Dueñas,
H. Castán,
H. García,
J. Barbolla,
E. San Andrés,
I. Mártil,
G. González-Díaz:
On the influence of substrate cleaning method and rapid thermal annealing conditions on the electrical characteristics of Al/SiNx/SiO2/Si fabricated by ECR-CVD.
Microelectronics Reliability 45(5-6): 978-981 (2005) |