 | 2012 |
| 3 |  | Dongil Kim,
Pilsung Kang,
Sungzoon Cho,
Hyoungjoo Lee,
Seungyong Doh:
Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing.
Expert Syst. Appl. 39(4): 4075-4083 (2012) |
| 2011 |
| 2 |  | Pilsung Kang,
Dongil Kim,
Hyoungjoo Lee,
Seungyong Doh,
Sungzoon Cho:
Virtual metrology for run-to-run control in semiconductor manufacturing.
Expert Syst. Appl. 38(3): 2508-2522 (2011) |
| 2009 |
| 1 |  | Pilsung Kang,
Hyoungjoo Lee,
Sungzoon Cho,
Dongil Kim,
Jinwoo Park,
Chan-Kyoo Park,
Seungyong Doh:
A virtual metrology system for semiconductor manufacturing.
Expert Syst. Appl. 36(10): 12554-12561 (2009) |