Marcus F. Doemling

	1999
1		Gottlieb S. Oehrlein, Marcus F. Doemling, Bernd E. E. Kastenmeier, Peter J. Matsuo, Neal R. Rueger, Marc Schaepkens, Theodorus E. F. M. Standaert: Surface science issues in plasma etching. IBM Journal of Research and Development 43(1): 181-198 (1999)

Coauthor Index

1	Bernd E. E. Kastenmeier	[1]
2	Peter J. Matsuo	[1]
3	Gottlieb S. Oehrlein	[1]
4	Neal R. Rueger	[1]
5	Marc Schaepkens	[1]
6	Theodorus E. F. M. Standaert	[1]

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