 | 2007 |
| 3 |  | Z. Li,
T. Schram,
L. Pantisano,
A. Stesmans,
Thierry Conard,
S. Shamuilia,
V. V. Afanasiev,
A. Akheyar,
Sven Van Elshocht,
D. P. Brunco,
W. Deweerd,
Y. Naoki,
P. Lehnen,
Stefan De Gendt,
K. De Meyer:
Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks.
Microelectronics Reliability 47(4-5): 518-520 (2007) |
| 2 |  | A. Rothschild,
R. Mitsuhashi,
C. Kerner,
X. Shi,
J. L. Everaert,
L. Date,
Thierry Conard,
Olivier Richard,
C. Vrancken,
R. Verbeeck,
A. Veloso,
A. Lauwers,
M. de Potter de ten Broeck,
I. Debusschere,
M. Jurczak,
M. Niwa,
P. Absil,
S. Biesemans:
Optimization of HfSiON using a design of experiment (DOE) approach on 0.45 V Vt Ni-FUSI CMOS transistors.
Microelectronics Reliability 47(4-5): 521-524 (2007) |
| 2005 |
| 1 |  | Vidya Kaushik,
Martine Claes,
Annelies Delabie,
Sven Van Elshocht,
Olivier Richard,
Thierry Conard,
Erika Rohr,
Thomas Witters,
Matty Caymax,
Stefan De Gendt:
Observation and characterization of defects in HfO2 high-K gate dielectric layers.
Microelectronics Reliability 45(5-6): 798-801 (2005) |