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| 1992 | ||
|---|---|---|
| 1 | B. Baccus, D. Collard, E. Dubois: Adaptive mesh refinement for multilayer process simulation using the finite element method. IEEE Trans. on CAD of Integrated Circuits and Systems 11(3): 396-403 (1992) | |
| 1 | B. Baccus | [1] |
| 2 | E. Dubois | [1] |
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