A. Champi

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2003

1 A. Champi, R. G. Lacerda, F. C. Marques: Thermomechanical properties of the amorphous carbon nitride thin films. Microelectronics Journal 34(5-8): 553-555 (2003)

	2003
1		A. Champi, R. G. Lacerda, F. C. Marques: Thermomechanical properties of the amorphous carbon nitride thin films. Microelectronics Journal 34(5-8): 553-555 (2003)

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