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| 2008 | ||
|---|---|---|
| 2 | Roland Biberger, Guenther Benstetter, Thomas Schweinboeck, Peter Breitschopf, Holger Goebel: Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectronics Reliability 48(8-9): 1339-1342 (2008) | |
| 2005 | ||
| 1 | Peter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger: Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling. Microelectronics Reliability 45(9-11): 1568-1571 (2005) | |
| 1 | Guenther Benstetter | [1] [2] |
| 2 | Roland Biberger | [2] |
| 3 | Werner Frammelsberger | [1] |
| 4 | Holger Goebel | [2] |
| 5 | Bernhard Knoll | [1] |
| 6 | Thomas Schweinboeck | [2] |
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