 | 2010 |
|---|
| 9 |       | Roland Biberger,
Guenther Benstetter,
Holger Goebel,
Alexander Hofer:
Intermittent-contact capacitance spectroscopy - A new method for determining C(V) curves with sub-micron lateral resolution.
Microelectronics Reliability 50(9-11): 1511-1513 (2010) |
| 2009 |
|---|
| 8 | | Roland Biberger,
Guenther Benstetter,
Holger Goebel:
Displacement current sensor for contact and intermittent contact scanning capacitance microscopy.
Microelectronics Reliability 49(9-11): 1192-1195 (2009) |
| 2008 |
|---|
| 7 | | Roland Biberger,
Guenther Benstetter,
Thomas Schweinboeck,
Peter Breitschopf,
Holger Goebel:
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling.
Microelectronics Reliability 48(8-9): 1339-1342 (2008) |
| 2007 |
|---|
| 6 | | M. Lanza,
M. Porti,
M. Nafría,
Guenther Benstetter,
Werner Frammelsberger,
H. Ranzinger,
E. Lodermeier,
G. Jaschke:
Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM.
Microelectronics Reliability 47(9-11): 1424-1428 (2007) |
| 2006 |
|---|
| 5 | | W. Bergbauer,
T. Lutz,
Werner Frammelsberger,
Guenther Benstetter:
Kelvin probe force microscopy - An appropriate tool for the electrical characterisation of LED heterostructures.
Microelectronics Reliability 46(9-11): 1736-1740 (2006) |
| 2005 |
|---|
| 4 | | Peter Breitschopf,
Guenther Benstetter,
Bernhard Knoll,
Werner Frammelsberger:
Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling.
Microelectronics Reliability 45(9-11): 1568-1571 (2005) |
| 2003 |
|---|
| 3 | | Michael W. Ruprecht,
Guenther Benstetter,
Douglas B. Hunt:
A review of ULSI failure analysis techniques for DRAMs. Part II: Defect isolation and visualization.
Microelectronics Reliability 43(1): 17-41 (2003) |
| 2 | | Werner Frammelsberger,
Guenther Benstetter,
Thomas Schweinboeck,
Richard J. Stamp,
Janice Kiely:
Characterization of thin and ultra-thin SiO2 films and SiO2/Si interfaces with combined conducting and topographic atomic force microscopy.
Microelectronics Reliability 43(9-11): 1465-1470 (2003) |
| 2002 |
|---|
| 1 | | Guenther Benstetter,
Michael W. Ruprecht,
Douglas B. Hunt:
A review of ULSI failure analysis techniques for DRAMs 1. Defect localization and verification.
Microelectronics Reliability 42(3): 307-316 (2002) |
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