Matthias Beichele

	2001
2		S. Strobel, Anton J. Bauer, Matthias Beichele, Heiner Ryssel: Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode in PMOS devices. Microelectronics Reliability 41(7): 1085-1088 (2001)
1		Matthias Beichele, Anton J. Bauer, Heiner Ryssel: Reliability of ultrathin nitrided oxides grown in low pressure N2O ambient. Microelectronics Reliability 41(7): 1089-1092 (2001)

Coauthor Index

1	Anton J. Bauer	[1] [2]
2	Heiner Ryssel	[1] [2]
3	S. Strobel	[2]

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