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| 2011 | ||
|---|---|---|
| 2 | R. Mukhiya, A. Bagolini, T. K. Bhattacharyya, L. Lorenzelli, M. Zen: Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH. Microelectronics Journal 42(1): 127-134 (2011) | |
| 2006 | ||
| 1 | Subhadeep Kal, A. Bagolini, B. Margesin, M. Zen: Stress and resistivity analysis of electrodeposited gold films for MEMS application. Microelectronics Journal 37(11): 1329-1334 (2006) | |
| 1 | T. K. Bhattacharyya (Tarun Kanti Bhattacharyya) | [2] |
| 2 | Subhadeep Kal | [1] |
| 3 | L. Lorenzelli | [2] |
| 4 | B. Margesin | [1] |
| 5 | R. Mukhiya | [2] |
| 6 | M. Zen | [1] [2] |
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