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| 1999 | ||
|---|---|---|
| 2 | Michael Armacost, Peter D. Hoh, Richard Wise, Wendy Yan, Jeffrey J. Brown, John H. Keller, George A. Kaplita, Scott D. Halle, K. Paul Muller, Munir D. Naeem, Senthil Srinivasan, Hung Y. Ng, Martin Gutsche, Alois Gutmann, Bruno Spuler: Plasma-etching processes for ULSI semiconductor circuits. IBM Journal of Research and Development 43(1): 39-72 (1999) | |
| 1995 | ||
| 1 | Eric Adler, John K. DeBrosse, Stephen F. Geissler, Steven J. Holmes, Mark D. Jaffe, Jeffrey B. Johnson, Charles W. Koburger III, Jerome B. Lasky, Brian Lloyd, Glen L. Miles, James S. Nakos, Wendell P. Noble Jr., Steven H. Voldman, Michael Armacost, Richard Ferguson: The evolution of IBM CMOS DRAM technology. IBM Journal of Research and Development 39(1-2): 167-188 (1995) | |
Colors in the list of coauthors
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