T. Akashi

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2008

1 T. Akashi, Y. Yoshimura: Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching CoRR abs/0802.3085: (2008)

	2008
1		T. Akashi, Y. Yoshimura: Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching CoRR abs/0802.3085: (2008)

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